发明申请
- 专利标题： FILM BULK ACOUSTIC RESONATOR INCLUDING RECESSED FRAME WITH SCATTERING SIDES
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申请号： US16877674申请日： 2020-05-19
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公开(公告)号： US20200373901A1公开(公告)日： 2020-11-26
- 发明人: Jiansong Liu , Yuhao Liu , Li Chen , Yiliu Wang , Benjamin Paul Abbott , Kwang Jae Shin , Chun Sing Lam
- 申请人： SKYWORKS GLOBAL PTE. LTD.
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H9/00 ; H03H9/17 ; H03H9/56 ; H03H9/70
摘要：
A film bulk acoustic wave resonator (FBAR) comprises a recessed frame region including an undulating perimeter.
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