- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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申请号: US17035296申请日: 2020-09-28
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公开(公告)号: US20210013205A1公开(公告)日: 2021-01-14
- 发明人: Chia-Chun LIAO , Chun-Sheng LIANG , Shu-Hui WANG , Shih-Hsun CHANG , Yi-Jen CHEN
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238 ; H01L29/49 ; H01L29/66
摘要:
A semiconductor device manufacturing method includes forming fins in first and second regions defined on a substrate. The fins include first fin, second fin, third fin, and fourth fin. A dielectric layer is formed over fins and a work function adjustment layer is formed over dielectric layer. A hard mask is formed covering third and fourth fins. A first conductive material layer is formed over first fin and not over second fin. A second conductive material layer is formed over first and second fins. A first metal gate electrode fill material is formed over first and second fins. The hard mask covering third and fourth fins is removed. A third conductive material layer is formed over third fin and not over fourth fin. A fourth conductive material layer is formed over third and fourth fins, and a second metal gate electrode fill material is formed over third and fourth fins.
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