Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US16942093Application Date: 2020-07-29
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Publication No.: US20210036020A1Publication Date: 2021-02-04
- Inventor: Seok Han PARK , Yong Seok KIM , Hui-Jung KIM , Satoru YAMADA , Kyung Hwan LEE , Jae Ho HONG , Yoo Sang HWANG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2019-0092960 20190731
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/1159 ; H01L49/02 ; H01L29/06 ; H01L29/45 ; H01L29/786 ; H01L29/78

Abstract:
A semiconductor device is provided. The semiconductor device includes a first stacked structure including a plurality of first insulating patterns and a plurality of first semiconductor patterns alternately stacked on a substrate, the first stacked structure extending in a first direction parallel to an upper surface of the substrate, a first conductive pattern on one side surface of the first stacked structure, the first conductive pattern extending in a second direction crossing the upper surface of the substrate, and a first ferroelectric layer between the first stacked structure and the first conductive pattern, the first ferroelectric layer extending in the second direction, wherein each of the first semiconductor patterns includes a first impurity region, a first channel region and a second impurity region which are sequentially arranged along the first direction.
Public/Granted literature
- US11469252B2 Semiconductor device Public/Granted day:2022-10-11
Information query
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