Invention Application
- Patent Title: ACOUSTIC WAVE DEVICE
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Application No.: US16912737Application Date: 2020-06-26
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Publication No.: US20210036209A1Publication Date: 2021-02-04
- Inventor: Takashi OSAWA , Masahiro FUKUSHIMA
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: JP2019-140976 20190731
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/047 ; H01L41/18

Abstract:
An acoustic wave device includes a piezoelectric substrate that includes first and second main surfaces, an IDT electrode on the first main surface, a support having a rectangular or substantially rectangular frame shape and including a cavity, first and second sides, and a first corner portion connected to the first and second sides, and the support being provided on the first main surface such that the cavity surrounds the IDT electrode, and a cover on the support and covering the cavity. A straight or substantially straight grinding trace is provided on the second main surface. The grinding trace leads to the first corner portion as viewed in plan. One of an angle between the first side and the grinding trace and an angle between the second side and the grinding trace as viewed in plan is about 9.5° or less.
Public/Granted literature
- US11765978B2 Acoustic wave device Public/Granted day:2023-09-19
Information query
IPC分类: