- 专利标题： GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
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申请号： US17060764申请日： 2020-10-01
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公开(公告)号： US20210102290A1公开(公告)日： 2021-04-08
- 发明人: Tomas Hernandez Acosta , Alexandros Demos , Peter Westrom , Caleb Miskin , Amir Kajbafvala , Ali Moballegh
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/52 ; B01J4/00 ; C23C16/46
摘要：
A gas injection system, a reactor system including the gas injection system, and methods of using the gas injection system and reactor system are disclosed. The gas injection system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas injection system coupled to a reaction chamber.
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