- 专利标题: LOW FREQUENCY VIBRATING ACTUATOR DEVICE
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申请号: US17023730申请日: 2020-09-17
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公开(公告)号: US20210126182A1公开(公告)日: 2021-04-29
- 发明人: Kang-Ho Park , Seongdeok Ahn , Jong Tae Lim , Chan Woo Park , Ji-Young Oh
- 申请人: Electronics And Telecommunications Research Institute
- 申请人地址: KR Daejeon
- 专利权人: Electronics And Telecommunications Research Institute
- 当前专利权人: Electronics And Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2019-0134859 20191028,KR10-2020-0035159 20200323
- 主分类号: H01L41/047
- IPC分类号: H01L41/047 ; H01L41/053 ; H01L41/083
摘要:
Provided is a low frequency vibrating actuator device. The low frequency vibrating actuator device includes a substrate including a pair of connection electrodes, an actuator provided on the pair of connection electrodes to generate vibration, a support provided on the actuator, a vibration membrane provided on the support to vibrate according to the actuator, and a vibrating mass provided on the vibration membrane to vibrate according to the vibration membrane. The actuator includes a plurality of laminated insulating layers and internal electrodes that are alternately laminated between the insulating layers adjacent to each other, and a top surface of the support, which contacts the vibration membrane, has an area that is equal to or less than that of a bottom surface of the support, which contacts the actuator.
公开/授权文献
- US11621389B2 Low frequency vibrating actuator device 公开/授权日:2023-04-04
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