- 专利标题: Vapor Jet Printing
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申请号: US17142490申请日: 2021-01-06
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公开(公告)号: US20210167291A1公开(公告)日: 2021-06-03
- 发明人: Michael HACK , William E. QUINN , Gregory MCGRAW , William T. MAYWEATHER, III , Julia J. BROWN
- 申请人: Universal Display Corporation
- 申请人地址: US NJ Ewing
- 专利权人: Universal Display Corporation
- 当前专利权人: Universal Display Corporation
- 当前专利权人地址: US NJ Ewing
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; C23C16/30 ; H01L51/52 ; H01L51/50
摘要:
Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.
公开/授权文献
- US12029102B2 Vapor jet printing 公开/授权日:2024-07-02
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