Invention Application
- Patent Title: HIGH DIELECTRIC CONSTANT MATERIAL AT LOCATIONS OF HIGH FIELDS
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Application No.: US16726477Application Date: 2019-12-24
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Publication No.: US20210193791A1Publication Date: 2021-06-24
- Inventor: Dan B. Kasha , Russell Croman , Stefan N. Mastovich , Thomas C. Fowler
- Applicant: Silicon Laboratories Inc.
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/00

Abstract:
An integrated circuit has an isolation capacitor structure that reduces the risk of breakdown from high electric fields at the edge of the top metal plate of the capacitor. The capacitor structure includes a bottom metal plate above a substrate. A first dielectric layer of a first dielectric material is formed between the bottom metal plate and the top metal plate. The capacitor structure also includes a thin narrow ring formed of a second dielectric material located under a portion of the top metal plate. The second dielectric material has a higher dielectric constant than the first dielectric material. The thin narrow ring follows the shape of the edge of the top metal plate with a portion of the ring underneath the top metal plate and a portion outside the edge of the top metal plate to thereby be located at a place of the maximum electric field.
Public/Granted literature
- US11205696B2 High dielectric constant material at locations of high fields Public/Granted day:2021-12-21
Information query
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