- 专利标题: Graphene-enabled Block Copolymer Lithography Transfer to Arbitrary Surfaces
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申请号: US17115572申请日: 2020-12-08
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公开(公告)号: US20210208501A1公开(公告)日: 2021-07-08
- 发明人: Keith E. Whitener , Woo K. Lee
- 申请人: The Government of the United States of America, as represented by the Secretary of the Navy
- 申请人地址: US VA Arlington
- 专利权人: The Government of the United States of America, as represented by the Secretary of the Navy
- 当前专利权人: The Government of the United States of America, as represented by the Secretary of the Navy
- 当前专利权人地址: US VA Arlington
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/34 ; C08J7/14 ; B29C71/02 ; C01B32/194
摘要:
A method of graphene-enabled block copolymer lithography transfer to an arbitrary substrate comprising the steps of applying graphene on a surface, adding block copolymers to the graphene on the surface, phase-separating the block copolymers, forming nanopatterned phase separated block copolymers, delaminating the graphene, and transferring the graphene and nanopatterned phase separated block copolymers to a second surface. A layer of nanopatterned phase separated block copolymers on an arbitrary surface comprising a first arbitrary substrate absent of chemical preparation, a layer of graphene on the first arbitrary substrate, and a layer of phase-separated block copolymers on the layer of graphene, wherein the layer of phase-separated block copolymers on the layer of graphene was formed on a second substrate and delaminated via water liftoff and wherein the nanopatterned phase separated block copolymers are utilized as a shadow mask for lithography on the first arbitrary substrate.
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