- 专利标题: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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申请号: US16890653申请日: 2020-06-02
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公开(公告)号: US20210210475A1公开(公告)日: 2021-07-08
- 发明人: Sang Hyun SUNG , Young Ki KIM , Jin Ho KIM , Byung Hyun JUN
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si
- 优先权: KR10-2020-0001707 20200106
- 主分类号: H01L25/18
- IPC分类号: H01L25/18 ; H01L27/11582 ; H01L23/00 ; H01L23/528 ; H01L27/11573
摘要:
A semiconductor memory device includes: a first pad layer in a surface of a memory chip including a cell region in which a memory cell array coupled to a plurality of row lines and a step region including staggered step portions of the plurality of row lines, and including a plurality of first pads that are coupled to the step portions; a second pad layer in a surface of a circuit chip bonded to the surface of the memory chip, and having a plurality of second pads coupled to a plurality of pass transistors defined in the circuit chip; a first redistribution line disposed in the first pad layer that couples one of the step portions and one of the pass transistors; and a second redistribution line disposed in the second pad layer that couples another one of the step portions and another one of the pass transistors.
公开/授权文献
- US11315914B2 Three-dimensional semiconductor memory device 公开/授权日:2022-04-26
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