- 专利标题: THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE, DISPLAY DEVICE AND SENSOR
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申请号: US16650484申请日: 2019-09-11
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公开(公告)号: US20210210622A1公开(公告)日: 2021-07-08
- 发明人: Bingqiang Gui , Lianjie Qu , Yonglian Qi , Hebin Zhao , Yun Qiu
- 申请人: BOE Technology Group Co., Ltd. , Beijing BOE Display Technology Co., Ltd.
- 申请人地址: CN Beijing; CN Beijing
- 专利权人: BOE Technology Group Co., Ltd.,Beijing BOE Display Technology Co., Ltd.
- 当前专利权人: BOE Technology Group Co., Ltd.,Beijing BOE Display Technology Co., Ltd.
- 当前专利权人地址: CN Beijing; CN Beijing
- 优先权: CN201811119902.1 20180925
- 国际申请: PCT/CN2019/105284 WO 20190911
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/786 ; H01L21/02
摘要:
Provided is a thin film transistor including a highly-textured dielectric layer, an active layer, a gate electrode and a source/drain electrode that are stacked on a base substrate. The source/drain electrode includes a source electrode and a drain electrode. The gate electrode and the active layer are insulated from each other. The source electrode and the drain electrode are electrically connected to the active layer. Constituent particles of the active layer are of monocrystalline silicon-like structures. According to the present disclosure, the highly-textured dielectric layer is adopted to replace an original buffer layer to induce the active layer to grow into a monocrystalline silicon-like structure, such that the performance of the thin film transistor is improved.
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