A chuck grip accuracy checking method includes a gripping in which the measurement target is gripped on the claws, a moving step, and a measuring step. In the moving step, a movable member provided with a measurement instrument capable of measuring a run-out of the measurement target is moved by driving a movable-member driver to a position at which the measurement instrument can measure a run-out of the measurement target. In the measuring step, a run-out of the measurement target is measured by the measurement instrument, while the chuck is being rotated by driving a rotation driver.