- 专利标题: HEAT DISSIPATION SYSTEM WITH MICROELECTROMECHANICAL SYSTEM (MEMS) FOR COOLING ELECTRONIC OR PHOTONIC COMPONENTS
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申请号: US17083152申请日: 2020-10-28
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公开(公告)号: US20210329810A1公开(公告)日: 2021-10-21
- 发明人: Joel Richard Goergen
- 申请人: CISCO TECHNOLOGY, INC.
- 申请人地址: US CA San Jose
- 专利权人: CISCO TECHNOLOGY, INC.
- 当前专利权人: CISCO TECHNOLOGY, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H05K7/20
- IPC分类号: H05K7/20 ; H01L23/427 ; G02B6/12
摘要:
In one or more embodiments, an apparatus includes a substrate and die package, a thermal transfer plate positioned adjacent to the substrate and die package for cooling the substrate and die package, wherein at least one electrical path extends through the thermal transfer plate for transmitting power from a power module to the substrate and die package, and a microelectromechanical system (MEMS) module comprising a plurality of air movement cells for dissipating heat from the thermal transfer plate.
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