A micro-electro-mechanical systems device includes a substrate, each of an electronic circuit, an etch stop layer, and a hinge base mounted on the substrate, and an electrode connected to the circuit. A hinge is mounted on the base and is made of a doped semiconductor. The hinge includes a vertical support that extends vertically from the base, and a horizontally-extending hinge tab contacts the vertical support. The device also includes a movable mirror and a mirror via that couples the mirror to the hinge tab. The mirror is electrostatically attracted to the electrode responsive to application of a voltage between the electrode and the mirror, and movement of the mirror changes a relative position between the hinge tab and the vertical support. A stopper is mounted on the substrate that mechanically stops the movement of the mirror before the mirror contacts the electrode or etch stop layer.