A method of processing an optical fiber includes drawing the optical fiber from an optical fiber preform within a draw furnace, the optical fiber extending from the draw furnace along a process pathway, the optical fiber comprising at least one halogen-doped core; and drawing the optical fiber through at least one slow cooling device positioned downstream from the draw furnace at a draw speed. The at least one slow cooling device exposes the optical fiber to a slow cooling device process temperature greater than or equal to 800° C. and less than or equal to 1600° C. The draw speed is such that the optical fiber has a residence time of at least 0.1 s in the at least one slow cooling device. An optical fiber made by such a process is also disclosed.