- 专利标题: METHOD FOR CONTROLLING A DRIVE APPARATUS OF A MICRO-OSCILLATION MIRROR, CONTROL DEVICE AND DEFLECTOR MIRROR APPARATUS
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申请号: US17283835申请日: 2019-10-07
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公开(公告)号: US20210382298A1公开(公告)日: 2021-12-09
- 发明人: Jochen Schenk , Michael Kleiser , Jürgen Nies , Frank Selbmann , Felix Müller
- 申请人: Valeo Schalter und Sensoren GmbH
- 申请人地址: DE Bietigheim-Bissingen
- 专利权人: Valeo Schalter und Sensoren GmbH
- 当前专利权人: Valeo Schalter und Sensoren GmbH
- 当前专利权人地址: DE Bietigheim-Bissingen
- 优先权: DE102018124964.0 20181010
- 国际申请: PCT/EP2019/077028 WO 20191007
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; B81B3/00
摘要:
A method for controlling a drive apparatus (20) of a micro-oscillation mirror (16), a control device (28) and a deflector mirror apparatus (14) are described. The drive apparatus (20) has at least two comb drives (22a, 22b) which are arranged on different radial sides of a pivoting axis (18) of the micro-oscillation mirror (16). In the method, at least two actuation signals AS1, AS2) are generated, and the at least two comb drives (22a, 22b) are therefore actuated at least temporarily in such a way that they drive the micro-oscillation mirror (16) in an oscillating fashion. At least one elongation signal (P1, P2), which characterizes the elongation (26) of the micro-oscillation mirror (16) is generated using at least one comb drive (22a, 22b). At least one of the actuation signals (AS1, AS2) is adapted to the oscillation of the micro-oscillation mirror (16) on the basis of at least one of the elongation signals (P1, P2), At least one of the comb drives (22a, 22b) is connected, by means of at least one switching apparatus (34), alternately to an actuation apparatus (32) for receiving at least one actuation signal (AS1, AS2) or to an elongation-detection apparatus (24) for generating at least one elongation signal (P1, P2).
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