- 专利标题: SYSTEM AND METHOD OF MEASURING SURFACE TOPOGRAPHY
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申请号: US17377439申请日: 2021-07-16
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公开(公告)号: US20220018656A1公开(公告)日: 2022-01-20
- 发明人: Shih-Yao PAN , Chih-Yao TING , Chia-Hung LIN , Hsin-Yun CHANG
- 申请人: Shih-Yao PAN , Chih-Yao TING , Chia-Hung LIN , Hsin-Yun CHANG
- 申请人地址: TW Taoyuan City; TW Taoyuan City; TW Taoyuan City; TW Taoyuan City
- 专利权人: Shih-Yao PAN,Chih-Yao TING,Chia-Hung LIN,Hsin-Yun CHANG
- 当前专利权人: Shih-Yao PAN,Chih-Yao TING,Chia-Hung LIN,Hsin-Yun CHANG
- 当前专利权人地址: TW Taoyuan City; TW Taoyuan City; TW Taoyuan City; TW Taoyuan City
- 优先权: TW109124147 20200717
- 主分类号: G01B11/30
- IPC分类号: G01B11/30
摘要:
Herein disclosed are a surface topography measuring system and a method thereof. The method comprises the following steps: dividing a test beam into a first sub-beam, entering a reflecting mirror along a first axis, and a second sub-beam, entering an object surface along a second axis; moving the reflecting mirror for reflecting the first sub-beam at different positions on the first axis to generate N reflected beams; generating an object reflected beam, related to the second sub-beam, reflected from the object surface; generating N images, related to the N reflected beams and the object reflected beam, and each of the N images having a plurality of interference fringes; analyzing the interference fringes in each of the N images to calculate N curve formulas; calculating a surface topography of the object surface from the N curve formulas.
公开/授权文献
- US11841218B2 System and method of measuring surface topography 公开/授权日:2023-12-12
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