Invention Application
- Patent Title: PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION
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Application No.: US17393968Application Date: 2021-08-04
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Publication No.: US20220066071A1Publication Date: 2022-03-03
- Inventor: Evgeniia Butaeva , Gildardo Delgado , Grace Chen , John Savee , Matthew Derstine , Vera (Guorong) Zhuang , Gary V. Lopez Lopez
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G02B1/14
- IPC: G02B1/14 ; C01F5/28
Abstract:
An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.
Information query
