A silicon-based OLED display substrate, a manufacturing method thereof and a display device are provided. The display substrate includes: a silicon-based base and a device layer arranged on the silicon-based base. The silicon-based base includes a drive circuit layer. The drive circuit layer includes a drive circuit, an electrical connection bonding area, and a storage unit storing compensation voltage of each MOSFET of the drive circuit. An orthographic projection of the drive circuit on the silicon-based base, an orthographic projection of the storage unit on the silicon-based base, and an orthographic projection of the electrical connection binding area on the silicon-based base do not overlap with each other.