Invention Application
- Patent Title: STRESS SENSOR, STRUCTURAL HEALTH MONITORING SYSTEM FOR CONSTRUCTIONS AND PROCESS FOR MANUFACTURING A STRESS SENSOR
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Application No.: US17562829Application Date: 2021-12-27
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Publication No.: US20220120633A1Publication Date: 2022-04-21
- Inventor: Santo Alessandro SMERZI
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102018000003693 20180316
- Main IPC: G01M5/00
- IPC: G01M5/00 ; G01L1/18 ; G01L5/162

Abstract:
A stress sensor includes: a substrate, having a face and a recess, open to the face; and a sensor chip of semiconductor material, housed in the recess and bonded to the substrate, the sensor chip being provided with a plurality of sensing components of piezoresistive material. The substrate has a thickness which is less by at least one order of magnitude with respect to a main dimension of the face. Further, the sensor chip has a thickness which is less by at least one order of magnitude with respect to the thickness of the substrate, and a Young's module of the substrate and a Young's module of the sensor chip are of the same order of magnitude.
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