Invention Application
- Patent Title: CLEANING SOLUTION DETECTION DEVICE
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Application No.: US17505185Application Date: 2021-10-19
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Publication No.: US20220126328A1Publication Date: 2022-04-28
- Inventor: Hyung Chul KIM , You Sun JUNG
- Applicant: KCTECH CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: KCTECH CO., LTD.
- Current Assignee: KCTECH CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR10-2020-0139576 20201026
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B5/04

Abstract:
A cleaning solution detection device includes a transfer part configured to unload and transfer a substrate having a surface to which a cleaning solution is applied when a cleaning process is completed, a detector configured to detect the cleaning solution that falls from the surface of the substrate in a process in which the substrate is unloaded and transferred by the transfer part, and a controller configured to determine whether a dangerous situation occurs due to a fall of the cleaning solution based on information detected by the detector.
Public/Granted literature
- US11883857B2 Cleaning solution detection device Public/Granted day:2024-01-30
Information query
IPC分类: