Invention Application
- Patent Title: RADIATION SOURCE
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Application No.: US17569674Application Date: 2022-01-06
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Publication No.: US20220128910A1Publication Date: 2022-04-28
- Inventor: Patrick Sebastian UEBEL , Sebastian Thomas BAUERSCHMIDT , Yongfeng NI
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP19188036.8 20190724,EP19198105.9 20190918,EP20151889.1 20200115
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B6/02 ; G02F1/365 ; G02F1/35 ; G03F9/00

Abstract:
A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
Information query
IPC分类: