- 专利标题: Methods of Gate Contact Formation for Vertical Transistors
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申请号: US17122219申请日: 2020-12-15
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公开(公告)号: US20220130963A1公开(公告)日: 2022-04-28
- 发明人: Sang-Yun Lee
- 申请人: Sang-Yun Lee Lee
- 申请人地址: US OR Hillsboro
- 专利权人: Sang-Yun Lee Lee
- 当前专利权人: Sang-Yun Lee Lee
- 当前专利权人地址: US OR Hillsboro
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L29/06 ; H01L27/108 ; H01L29/66
摘要:
Structures and methods that facilitate the formation of gate contacts for vertical transistors constructed with semiconductor pillars and spacer-like gates are disclosed. In a first embodiment, a gate contact rests on an extended gate region, a piece of a gate film, patterned at a side of a vertical transistor at the bottom of the gate. In a second embodiment, an extended gate region is patterned on top of one or more vertical transistors, resulting in a modified transistor structure. In a third embodiment, a gate contact rests on a top surface of a gate merged between two closely spaced vertical transistors. Optional methods and the resultant intermediate structures are included in the first two embodiments in order to overcome the related topography and ease the photolithography. The third embodiment includes alternatives for isolating the gate contact from the semiconductor pillars or for isolating the affected semiconductor pillars from the substrate.
公开/授权文献
- US11978777B2 Methods of gate contact formation for vertical transistors 公开/授权日:2024-05-07
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