- 专利标题: MASK ASSEMBLY AND MANFUCTURING METHOD THEREOF
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申请号: US17371359申请日: 2021-07-09
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公开(公告)号: US20220131075A1公开(公告)日: 2022-04-28
- 发明人: Duckjung LEE
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 优先权: KR10-2020-0139410 20201026
- 主分类号: H01L51/00
- IPC分类号: H01L51/00 ; H01L51/56 ; G03F7/00
摘要:
A mask assembly includes a mask frame including a cell opening, and an outer frame defined along a periphery of the cell opening, and a cell mask disposed on the mask frame and including a polymer material. The cell mask includes a masking part which includes a deposition part disposed corresponding to the cell opening of the mask frame and including a masking pattern, and a non-deposition part extending from the deposition part, and a bonding part overlapping the outer frame of the mask frame and extending from the masking part. The non-deposition part includes a non-pattern portion, and a pattern portion having a thickness smaller than a thickness of the non-pattern portion.
公开/授权文献
- US11937492B2 Mask assembly and manufacturing method thereof 公开/授权日:2024-03-19
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