Invention Application
- Patent Title: REFLECTOR MANUFACTURING METHOD AND ASSOCIATED REFLECTOR
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Application No.: US17433774Application Date: 2020-01-28
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Publication No.: US20220134693A1Publication Date: 2022-05-05
- Inventor: Sander Bas ROOBOL , Sietse Thijmen VAN DER POST
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP19159257.5 20190226
- International Application: PCT/EP2020/051986 WO 20200128
- Main IPC: B29D11/00
- IPC: B29D11/00 ; G03F7/20 ; G03F7/00

Abstract:
Disclosed is a method of manufacturing a reflector. The method comprises polishing (520) at least the uppermost surface of the uppermost substantially flat substrate of a plurality of substantially flat substrates, deforming (530) each substantially flat substrate into the desired shape, and bonding (540) the deformed substrates together to form said reflector. In an embodiment, the deforming and bonding is performed together using a mold.
Public/Granted literature
- US12269229B2 Reflector manufacturing method and associated reflector Public/Granted day:2025-04-08
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