Method for controlling a production process for producing components, wherein the components or a manufacturing device used to produce the components has/have at least one first feature which can be captured using metrology; at least having the following steps: a) determining a test plan for capturing the first feature with a first value of a first test frequency, wherein at least one first stability criterion is defined for the first feature; b) producing the components and carrying out the test plan in a parallel manner, wherein the first feature is tested at the first test frequency; c) evaluating the test results; d) changing the first test frequency, wherein the first test frequency is increased if at least one test result for the first feature violates the first stability criterion; wherein the first test frequency is reduced if all test results are in accordance with the first stability criterion.