Invention Application
- Patent Title: METHOD FOR TRANSFERRING BLOCKS FROM A DONOR SUBSTRATE ONTO A RECEIVER SUBSTRATE
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Application No.: US17440450Application Date: 2020-03-25
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Publication No.: US20220148911A1Publication Date: 2022-05-12
- Inventor: Didier Landru , Bruno Ghyselen
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Priority: FRFR1903350 20190329
- International Application: PCT/EP2020/058427 WO 20200325
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/265 ; H01L21/78

Abstract:
A process for transferring blocks from a donor to a receiver substrate, comprises: arranging a mask facing a free surface of the donor substrate, the mask having one or more openings that expose the free surface of the donor substrate, the openings distributed according to a given pattern; forming, by ion implantation through the mask, an embrittlement plane in the donor substrate vertically in line with at least one region exposed through the mask, the embrittlement plane delimiting a respective surface region; forming a block that is raised relative to the free surface of the donor substrate localized vertically in line with each respective embrittlement plane, the block comprising the respective surface region; bonding the donor substrate to the receiver substrate via each block located at the bonding interface, after removing the mask; and detaching the donor substrate along the localized embrittlement planes to transfer blocks onto the receiver substrate.
Public/Granted literature
Information query
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