Invention Application
- Patent Title: THERMAL PLASMA PROCESSING APPARATUS
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Application No.: US17424143Application Date: 2020-01-20
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Publication No.: US20220151053A1Publication Date: 2022-05-12
- Inventor: Hyunwoo PARK , Wooil KIM , Gyegwang LEE , Imjun CHO
- Applicant: LG ELECTRONICS INC.
- Applicant Address: KR Seoul
- Assignee: LG ELECTRONICS INC.
- Current Assignee: LG ELECTRONICS INC.
- Current Assignee Address: KR Seoul
- Priority: KR10-2019-0007398 20190121
- International Application: PCT/KR2020/000924 WO 20200120
- Main IPC: H05H1/34
- IPC: H05H1/34 ; H05H1/28 ; H05H1/42

Abstract:
The present disclosure relates to a thermal plasma processing apparatus capable of efficiently using thermal plasma and securing a reaction time for the thermal decomposition of the processing gas. A Thermal plasma processing apparatus according to an embodiment of the present disclosure includes a torch part in which an arc is generated between a negative electrode and a positive electrode, and in which a processing gas to be thermally decomposed by the arc is injected between the negative electrode and the positive electrode, a power supply part configured to be connected to the negative electrode and the positive electrode and to apply a high voltage between the negative electrode and the positive electrode, and a reaction part configured to communicate with the torch part and to generate turbulence in the processing gas passing through the torch part.
Public/Granted literature
- US12284746B2 Thermal plasma processing apparatus Public/Granted day:2025-04-22
Information query
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