Invention Application
- Patent Title: APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Application No.: US17356998Application Date: 2021-06-24
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Publication No.: US20220157566A1Publication Date: 2022-05-19
- Inventor: Jiye KIM , In Cheol SONG , Woongpil JEON , Daihong KIM , Jaebeom PARK , Byungho CHUN
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0155349 20201119
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05K9/00 ; C23C16/505

Abstract:
An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.
Public/Granted literature
- US12074011B2 Apparatus for and method of manufacturing semiconductor device Public/Granted day:2024-08-27
Information query