- 专利标题: CLEANING MATERIALS AND PROCESSES FOR LITHIUM PROCESSING EQUIPMENT
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申请号: US17529463申请日: 2021-11-18
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公开(公告)号: US20220162747A1公开(公告)日: 2022-05-26
- 发明人: Tapash Chakraborty , Nitin Deepak , Prerna Sonthalia Goradia , Bahubali S. Upadhye , Nilesh Chimanrao Bagul , Subramanya P. Herle , Visweswaren Sivaramakrishnan
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: C23C16/44
- IPC分类号: C23C16/44
摘要:
Exemplary methods of removing lithium-containing deposits may include heating a surface of a lithium-containing deposit. The surface may include oxygen or nitrogen, and the lithium-containing deposit may be disposed on a surface of a processing chamber. The methods may include contacting the surface of the lithium-containing deposit with a hydrogen-containing precursor. The contacting may hydrogenate the surface of the lithium-containing deposit. The methods may include contacting the lithium-containing deposit with a nitrogen-containing precursor to form volatile byproducts. The methods may include exhausting the volatile byproducts of the lithium-containing deposit from the processing chamber.