Invention Application
- Patent Title: DISPLACEMENT SENSOR AND PROFILE MEASUREMENT APPARATUS
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Application No.: US17518954Application Date: 2021-11-04
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Publication No.: US20220163319A1Publication Date: 2022-05-26
- Inventor: Akihide Kimura
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Priority: JP2020-194314 20201124
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24

Abstract:
A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
Public/Granted literature
- US11686570B2 Displacement sensor and profile measurement apparatus Public/Granted day:2023-06-27
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