Invention Application
- Patent Title: RADIATION SENSOR WITH AN INTEGRATED MECHANICAL OPTICAL MODULATOR AND RELATED MANUFACTURING PROCESS
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Application No.: US17530785Application Date: 2021-11-19
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Publication No.: US20220163383A1Publication Date: 2022-05-26
- Inventor: Michele VAIANA , Enri DUQI , Maria Eloisa CASTAGNA
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102020000027912 20201120
- Main IPC: G01J1/36
- IPC: G01J1/36 ; H01L33/46

Abstract:
Radiation sensor including a detection assembly and a chopper assembly, which are mechanically coupled to delimit a main cavity; and wherein the chopper assembly includes: a suspended movable structure, which extends in the main cavity; and an actuation structure, which is electrically controllable to cause a change of position of the suspended movable structure. The detection unit includes a detection structure, which faces the main cavity and includes a number of detection devices. The suspended movable structure includes a first shield of conductive material, which shields the detection devices from the radiation, the shielding of the detection devices being a function of the position of the suspended movable structure.
Public/Granted literature
- US12066324B2 Radiation sensor with an integrated mechanical optical modulator and related manufacturing process Public/Granted day:2024-08-20
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