Invention Application
- Patent Title: Methods Used In Forming A Memory Array Comprising Strings Of Memory Cells
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Application No.: US17670685Application Date: 2022-02-14
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Publication No.: US20220165742A1Publication Date: 2022-05-26
- Inventor: John D. Hopkins , Alyssa N. Scarbrough
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/1157 ; H01L27/11565 ; H01L27/11519 ; H01L27/11524 ; H01L27/11582

Abstract:
A method used in forming a memory array comprising strings of memory cells comprises forming a lower portion of a stack that will comprise vertically-alternating first tiers and second tiers on a substrate. The stack comprises laterally-spaced memory-block regions, Material of the first tiers is of different composition from material of the second tiers. Horizontally-elongated lines are formed in the lower portion that are individually between immediately-laterally-adjacent of the memory-block regions. The lines comprise sacrificial material. The lines individually comprise laterally-opposing projections longitudinally therealong in a lowest of the first tiers. The vertically-alternating first tiers and second tiers of an upper portion of the stack are formed above the lower portion and the lines, and channel-material strings are formed that extend through the first tiers and the second tiers in the upper portion to the lower portion. Horizontally-elongated trenches are formed into the stack that are individually between the immediately-laterally-adjacent memory-block regions and extend to the line there-between. The sacrificial material of the lines and projections is removed through the trenches. Intervening material is formed in the trenches and void-spaces left as a result of the removing of the sacrificial material of the lines. Other embodiments are disclosed.
Public/Granted literature
- US12213311B2 Methods used in forming a memory array comprising strings of memory cells Public/Granted day:2025-01-28
Information query
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