Invention Application
- Patent Title: METHOD OF MANUFACTURING LIGHT EMITTING ELEMENT AND METHOD OF MANUFACTURING DISPLAY DEVICE
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Application No.: US17454459Application Date: 2021-11-10
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Publication No.: US20220165786A1Publication Date: 2022-05-26
- Inventor: Se Hun KIM , Chang Hee LEE , Jae Kook HA , In Pyo KIM , Jun Bo SIM , Hyo Jin KO , Chan Woo JOO , Na Mi HONG
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2020-0161405 20201126
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01L33/00 ; H01L33/24 ; H01L33/38 ; H01L33/44

Abstract:
A method of manufacturing a light emitting element includes: forming a plurality of light emitting patterns on a stack substrate; forming a polysilazane layer on the plurality of light emitting patterns; forming a first insulating film by curing the polysilazane layer; and forming a second insulating film on the first insulating film. The forming of the first insulating film includes photocuring the polysilazane layer by irradiating ultraviolet rays onto the polysilazane layer. The forming of the plurality of light emitting patterns includes: forming a light emitting stack structure on the stack substrate; and etching the light emitting stack structure.
Information query
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