Invention Application
- Patent Title: MASK, METHOD OF PROVIDING MASK, AND METHOD OF PROVIDING DISPLAY PANEL USING THE SAME
-
Application No.: US17396874Application Date: 2021-08-09
-
Publication No.: US20220165997A1Publication Date: 2022-05-26
- Inventor: SEUL LEE , MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG , SUNGSOON IM
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2020-0158486 20201124
- Main IPC: H01L51/56
- IPC: H01L51/56 ; G03F7/00 ; C23C14/04 ; C23C16/04

Abstract:
A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
Public/Granted literature
- US11825727B2 Mask, method of providing mask, and method of providing display panel using the same Public/Granted day:2023-11-21
Information query
IPC分类: