An embodiment anode active material for an all-solid-state battery includes a carbon-based material including carbon-based particles and a coating layer formed on a surface of the carbon-based particles, the coating layer comprising amorphous carbon, and a silicon-based material. An embodiment method of manufacturing an anode active material for an all-solid-state battery includes manufacturing a carbon-based material by forming a coating layer including amorphous carbon from a hydrocarbon gas on a surface of carbon-based particles through thermal chemical vapor deposition, manufacturing a silicon-based material through thermal chemical vapor deposition using a feed comprising silane gas and ammonia gas, and mixing the carbon-based material and the silicon-based material.