Invention Application
- Patent Title: ADHESION PROMOTING LAYER, METHOD FOR DEPOSITING CONDUCTIVE LAYER ON INORGANIC OR ORGANIC-INORGANIC HYBRID SUBSTRATE, AND CONDUCTIVE STRUCTURE
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Application No.: US17199462Application Date: 2021-03-12
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Publication No.: US20220177364A1Publication Date: 2022-06-09
- Inventor: Yiu-Hsiang Chang , Wei-Yen Wang , Meng-Chi Huang
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW109143496 20201209
- Main IPC: C03C17/36
- IPC: C03C17/36 ; C23C18/38 ; C23C18/12

Abstract:
Provided are an adhesion promoting layer, a method for depositing a conductive layer on an inorganic or organic-inorganic hybrid substrate and a conductive structure. The adhesion promoting layer is suitable for depositing a conductive layer on an inorganic or organic-inorganic hybrid substrate, which includes a metal oxide layer and an interface layer. The metal oxide layer is disposed on the inorganic or organic-inorganic hybrid substrate. The interface layer is disposed between the metal oxide layer and the inorganic or organic-inorganic hybrid substrate. The metal oxide layer includes metal oxide and a chelating agent. The interface layer includes the metal oxide, the chelating agent and metal-nonmetal-oxide composite material.
Information query