Invention Application
- Patent Title: MEMS ACTUATION DEVICE WITH SPARSE PULSES
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Application No.: US17117469Application Date: 2020-12-10
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Publication No.: US20220185658A1Publication Date: 2022-06-16
- Inventor: Davide TERZI
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza (MB)
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G02B7/182

Abstract:
A method of operating a MEMS device includes generating a MEMS drive signal, and generating and modifying the MEMS drive signal based upon a control signal to produce a modified drive signal. The method further includes generating the control signal by determining when a feedback signal from the MEMS device is at its peak value, comparing the peak value to a desired value when the feedback signal is as its peak, and generating the control signal depending upon whether the peak value is at least equal to a desired value. The modification of the MEMS drive signal based upon the control signal to produce the modified drive signal includes skipping generation of a next pulse of the modified drive signal when the control signal indicates the peak value is at least equal to the desired value.
Public/Granted literature
- US11802042B2 MEMS actuation device with sparse pulses Public/Granted day:2023-10-31
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