Invention Application
- Patent Title: SUPPORT STRUCTURE FOR MICRO-VIBRATOR AND METHOD OF MANUFACTURING INERTIAL SENSOR
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Application No.: US17516821Application Date: 2021-11-02
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Publication No.: US20220187072A1Publication Date: 2022-06-16
- Inventor: TERUHISA AKASHI , HIROFUMI FUNABASHI , YUUKI INAGAKI
- Applicant: DENSO CORPORATION , MIRISE Technologies Corporation , TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Kariya-city; JP Nisshin-shi; JP Toyota-shi
- Assignee: DENSO CORPORATION,MIRISE Technologies Corporation,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: DENSO CORPORATION,MIRISE Technologies Corporation,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Kariya-city; JP Nisshin-shi; JP Toyota-shi
- Priority: JP2020-208757 20201216
- Main IPC: G01C19/5691
- IPC: G01C19/5691 ; B81C1/00

Abstract:
A support structure for a micro-vibrator includes: a micro-vibrating body having a curved surface portion and a recess recessed from the curved surface portion; and a support member having a rod and an adhesive member arranged at a tip end of the rod. The support member is adhered on a connecting surface of the recess through the adhesive member. The connecting surface of the recess is an internal bottom surface of the recess.
Public/Granted literature
- US12104904B2 Support structure for micro-vibrator and method of manufacturing inertial sensor Public/Granted day:2024-10-01
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