- 专利标题: MICRO-SEMICONDUCTOR CHIP WETTING ALIGNMENT APPARATUS
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申请号: US17383012申请日: 2021-07-22
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公开(公告)号: US20220189810A1公开(公告)日: 2022-06-16
- 发明人: Kyungwook HWANG , Hyunjoon KIM , Joonyong PARK , Seogwoo HONG , Junsik HWANG
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2021-0019353 20210210
- 主分类号: H01L21/68
- IPC分类号: H01L21/68 ; H01L21/683 ; H01L25/075
摘要:
A micro-semiconductor chip wet alignment apparatus is provided. The micro-semiconductor chip wet alignment apparatus includes a semiconductor chip wet supply module configured to supply the plurality of micro-semiconductor chips and a liquid onto the transfer substrate so that the plurality of micro-semiconductor chips are flowable on the transfer substrate; and a chip alignment module including an absorber capable of relative movement along a surface of the transfer substrate and configured to absorb the liquid so that the plurality of micro-semiconductor chips are aligned in the plurality of grooves.
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