Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICES, METHODS FOR FABRICATING THE SAME AND ELECTRONIC SYSTEMS INCLUDING THE SAME
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Application No.: US17412408Application Date: 2021-08-26
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Publication No.: US20220189876A1Publication Date: 2022-06-16
- Inventor: Geun Won Lim , Beyoung Hyun Koh , Yong Jin Kwon , Joong Shik Shin
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0174976 20201215
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L27/11556 ; H01L27/11529 ; H01L27/11582 ; H01L27/11573 ; H01L21/768

Abstract:
A semiconductor memory device may include a mold structure that includes mold insulation films and gate electrodes alternately stacked on a first substrate, a channel structure that penetrates the mold structure and intersects the gate electrodes, a block separation region that extends in a first direction parallel to an upper surface of the first substrate and cuts the mold structure, a first dam region and a second dam region spaced apart from each other, that each having a closed loop in a plan view and each cutting the mold structure, pad insulation films in the first and second dam regions that are alternately stacked with the mold insulation films and include a material different from the mold insulation films, and a through via which penetrates through the first substrate, the mold insulation films, and the pad insulation films, in the first dam region but not in the second dam region.
Public/Granted literature
- US12199043B2 Semiconductor memory devices, methods for fabricating the same and electronic systems including the same Public/Granted day:2025-01-14
Information query
IPC分类: