Invention Application
- Patent Title: ETCHANT COMPOSITION, AND METHOD FOR MANUFACTURING METAL PATTERN AND THIN FILM TRANSISTOR SUBSTRATE USING THE SAME
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Application No.: US17566427Application Date: 2021-12-30
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Publication No.: US20220205110A1Publication Date: 2022-06-30
- Inventor: BONG-KYUN KIM , CHANGWOO KWON , SEUNGBO SHIM , ILBAE AHN , SEOKJUN JANG , JINSUEK KIM , JI-HUN PARK , YONG-SU LEE , YANGIL JEON , GYU-PO KIM , SANG-WOO KIM , HYUN-CHEOL SHIN
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2020-0188136 20201230,KR10-2021-0193493 20211230
- Main IPC: C23F1/26
- IPC: C23F1/26 ; C23F1/18 ; H01L21/027

Abstract:
An etchant composition of an embodiment may etch a multi-layered film of titanium/copper and may include about 5 wt % to about 20 wt % of persulfate, about 0.1 wt % to about 5 wt % of phosphoric acid or phosphate, about 0.01 wt % to about 2 wt % of a carbonyl ring compound, about 0.01 wt % to about 1 wt % of a 3-nitrogen ring compound, about 0.1 wt % to about 2 wt % of a 4-nitrogen ring compound, about 0.1 wt % to about 0.9 wt % of a fluorine compound, about 0.1 wt % to about 0.5 wt % of hydrogen about 1 wt % to about 3 wt % of a zwitterionic compound, and sulfate, water which is included in an amount that makes the total weight of the entire composition about 100 wt %.
Public/Granted literature
- US1813432A Separable fastener Public/Granted day:1931-07-07
Information query
IPC分类: