ALIGNMENT METHOD AND TOOLS
Abstract:
A laser system includes a first laser cavity to output a laser light along a first path, a first mirror to receive the laser light from the first laser cavity, and redirect the laser light along a second path that is different than the first path, a second mirror to receive the laser light from the first mirror, and redirect the laser light along a third path that is different than the first path and the second path, a beam splitter located at a first position on the third path, a beam combiner located at a second position on the third path; and a coupling lens assembly, the coupling lens assembly including a lens located at a third position on the third path, wherein the coupling lens assembly moves the lens in x-, y-, and x-directions.
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