发明申请
- 专利标题： METHOD FOR PROVIDING A WEAR-RESISTANT MATERIAL ON A BODY, AND COMPOSITE BODY
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申请号： US17606493申请日： 2020-04-01
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公开(公告)号： US20220206396A1公开(公告)日： 2022-06-30
- 发明人: Andrey NIKIPELOV , Antonius Franciscus Johnnes DE GROOT
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven
- 优先权： EP19171823.8 20190430
- 国际申请： PCT/EP2020/059188 WO 20200401
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; H01L21/687
摘要：
A method for providing a wear-resistant material on a body. A composite body that may be obtained by the method. The composite body may be a substrate holder or a reticle clamp for use in a lithographic apparatus. The method includes providing a body made of glass, ceramic or glass-ceramic; providing a wear-resistant material having a hardness of more than 20 GPa; and brazing or laser welding the wear-resistant material to the body.
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