Invention Application
- Patent Title: LASER FOCUSSING MODULE
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Application No.: US17600763Application Date: 2020-04-03
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Publication No.: US20220206397A1Publication Date: 2022-06-30
- Inventor: Ruud Antonius Catharina Maria BEERENS , Nico Johannes Antonius BOONEN , Stefan Michael Bruno BÄUMER , Tolga Mehmet ERGIN , Andreas Kristian HOPF , Derk Jan Wilfred KLUNDER , Martin Anton LAMBERT , Stefan PIEHLER , Manisha RANJAN , Frank Bernhard SPERLING , Andrey Sergeevich TYCHKOV , Jasper WITTE , Jiayue YUAN
- Applicant: ASML Netherlands B.V. , Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Applicant Address: NL Veldhoven; DE Ditzingen
- Assignee: ASML Netherlands B.V.,Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Current Assignee: ASML Netherlands B.V.,Trumpf Lasersystems For Semiconductor Manufacturing GmbH
- Current Assignee Address: NL Veldhoven; DE Ditzingen
- Priority: EP19167261.7 20190404
- International Application: PCT/EP2020/059614 WO 20200403
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00 ; H01S3/00

Abstract:
A laser focusing system (330) for use in an EUV radiation source is described, the laser focusing system comprising: •—a first curved mirror (330.1) configured to receive a laser beam from a beam delivery system (320) and generate a first reflected laser beam (316); •—a second curved mirror (330.2) configured to receive the first reflected laser beam (316) and generate a second reflected laser beam (317), wherein the laser focusing system (330) is configured to focus the second reflected laser beam (317) to a target location (340) in a vessel (350) of the EUV radiation source (360).
Public/Granted literature
- US12007693B2 Laser focussing module Public/Granted day:2024-06-11
Information query
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