Invention Application
- Patent Title: BULK ACOUSTIC RESONATOR FILTER
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Application No.: US17315577Application Date: 2021-05-10
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Publication No.: US20220209744A1Publication Date: 2022-06-30
- Inventor: Tae Kyung LEE , Chan Hee PARK , Jae Goon AUM
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0183642 20201224
- Main IPC: H03H9/205
- IPC: H03H9/205 ; H03H9/54 ; H03H9/02 ; H03H9/13

Abstract:
A bulk acoustic resonator filter includes: a series bulk acoustic resonator electrically connected, in series, between first and second ports through which a radio frequency (RF) signal passes; a second shunt bulk acoustic resonator, electrically shunt connected between the series bulk acoustic resonator and a ground and having a resonance frequency lower than that of the series bulk acoustic resonator; and a first shunt bulk acoustic resonator electrically connected to the second shunt bulk acoustic resonator in series and having a resonance frequency higher than that of the second shunt bulk acoustic resonator. One or both of the series bulk acoustic resonator and the first shunt bulk acoustic resonator includes a first electrode disposed above a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; and a trench formed in an upper surface or above the second electrode and recessed downwardly.
Public/Granted literature
- US12028045B2 Bulk acoustic resonator filter Public/Granted day:2024-07-02
Information query
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