- 专利标题: Double Sided Oil Film Thrust Bearing in a Scroll Pump
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申请号: US17607363申请日: 2019-04-30
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公开(公告)号: US20220220852A1公开(公告)日: 2022-07-14
- 发明人: Ronald J. Forni
- 申请人: Agilent Technologies, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 国际申请: PCT/US2019/030044 WO 20190430
- 主分类号: F01C21/02
- IPC分类号: F01C21/02 ; F04C18/02 ; F04C29/02 ; F04C27/00
摘要:
A vacuum scroll pump having an inlet portion having a pump inlet, and an exhaust portion having a pump outlet; a frame; a stationary scroll plate fixed to the frame and comprising a stationary plate comprising at least one stationary scroll blade; an orbiting scroll plate comprising an orbiting plate comprising at least one orbiting scroll blade projecting axially from a front side of the orbiting plate toward the stationary plate; a drive mechanism supported by the frame and operatively connected to the orbiting scroll plate so as to cause the orbiting scroll plate to orbit about a longitudinal axis of the vacuum scroll pump and thereby pump a process gas; a double-sided thrust bearing supporting the orbiting scroll plate; and a bellows which isolates the process gas from the drive mechanism.
公开/授权文献
- US12098642B2 Double sided oil film thrust bearing in a scroll pump 公开/授权日:2024-09-24
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