Double Sided Oil Film Thrust Bearing in a Scroll Pump
摘要:
A vacuum scroll pump having an inlet portion having a pump inlet, and an exhaust portion having a pump outlet; a frame; a stationary scroll plate fixed to the frame and comprising a stationary plate comprising at least one stationary scroll blade; an orbiting scroll plate comprising an orbiting plate comprising at least one orbiting scroll blade projecting axially from a front side of the orbiting plate toward the stationary plate; a drive mechanism supported by the frame and operatively connected to the orbiting scroll plate so as to cause the orbiting scroll plate to orbit about a longitudinal axis of the vacuum scroll pump and thereby pump a process gas; a double-sided thrust bearing supporting the orbiting scroll plate; and a bellows which isolates the process gas from the drive mechanism.
公开/授权文献
信息查询
0/0