发明申请
- 专利标题: IMAGE SENSOR
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申请号: US17647348申请日: 2022-01-07
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公开(公告)号: US20220231060A1公开(公告)日: 2022-07-21
- 发明人: Jiyoun Song , Ingyu Baek , Daehoon Kim , Seungsik Kim
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR SUWON-SI
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR SUWON-SI
- 优先权: KR10-2021-0006813 20210118
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
Provided is an image sensor including a semiconductor substrate having first and second surfaces, transistors on the first surface, first and second lower pad electrodes apart from each other on a first interlayer insulating film covering the transistors, a mold insulating layer on the first and second lower pad electrodes, a first lower electrode inside a first opening passing through the mold insulating layer on the first lower pad electrode, a second lower electrode inside a second opening passing through the mold insulating layer on the second lower pad electrode, a dielectric film and an upper electrode on the first and second lower electrodes, a first contact plug passing through the mold insulating layer and connected to the first lower pad electrode, and a second contact plug passing through the mold insulating layer and connected to the second lower pad electrode.
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IPC分类: