Invention Application
- Patent Title: BACK SIDE CONTACT STRUCTURE FOR A SEMICONDUCTOR DEVICE AND CORRESPONDING MANUFACTURING PROCESS
-
Application No.: US17573449Application Date: 2022-01-11
-
Publication No.: US20220246735A1Publication Date: 2022-08-04
- Inventor: Crocifisso Marco Antonio RENNA , Antonio LANDI , Brunella CAFRA
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102021000001922 20210129
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/66 ; H01L29/739 ; H01L29/40 ; H01L29/45

Abstract:
Various embodiments provide a vertical-conduction semiconductor device that includes: a silicon substrate having a front face and a rear face; a front-side structure arranged on the front face of the substrate, having at least one current-conduction region at the front face; and a back side metal structure, arranged on the rear face of the substrate, in electrical contact with the substrate and constituted by a stack of metal layers. The back side metal structure is formed by: a first metal layer; a silicide region, interposed between the rear face of the substrate and the first metal layer and in electrical contact with the aforesaid rear face; and a second metal layer arranged on the first metal layer.
Public/Granted literature
- US11894432B2 Back side contact structure for a semiconductor device and corresponding manufacturing process Public/Granted day:2024-02-06
Information query
IPC分类: