Invention Application
- Patent Title: Reflective Two-Dimensional Spatial Light Modulators
-
Application No.: US17591858Application Date: 2022-02-03
-
Publication No.: US20220252858A1Publication Date: 2022-08-11
- Inventor: Alexander Payne , James Hunter , Tianbo Liu
- Applicant: SILICON LIGHT MACHINES CORPORATION
- Applicant Address: US CA San Jose
- Assignee: SILICON LIGHT MACHINES CORPORATION
- Current Assignee: SILICON LIGHT MACHINES CORPORATION
- Current Assignee Address: US CA San Jose
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08

Abstract:
A high-contrast two-dimensional Micro-Electromechanical System light modulator and methods of fabricating and operating the same in various applications is provided. Generally, the light modulator includes a single, deformable membrane suspended over a surface of a substrate by posts at corners thereof, the deformable membrane including an electrostatically deflectable patterned central portion (CP) and a number of flexures through which the CP is coupled to the posts. A membrane reflector is formed on a surface of the CP, and a substrate reflector over a surface of the substrate, and the substrate reflector exposed through void spaces between the posts, flexures and CP. The light modulator is operable so that when the membrane reflector is deformed into a non-planar surface by electrostatic deflection of the CP, and light reflected from the membrane reflector is brought into phase interference with light reflected from the substrate reflector.
Public/Granted literature
- US12181657B2 Reflective two-dimensional spatial light modulators Public/Granted day:2024-12-31
Information query